Invention Grant
US08256373B2 Device for depositing a layer of polycrystalline silicon on a support 失效
用于在支撑体上沉积多晶硅层的装置

  • Patent Title: Device for depositing a layer of polycrystalline silicon on a support
  • Patent Title (中): 用于在支撑体上沉积多晶硅层的装置
  • Application No.: US10584698
    Application Date: 2004-12-10
  • Publication No.: US08256373B2
    Publication Date: 2012-09-04
  • Inventor: Christian BelouetClaude Remy
  • Applicant: Christian BelouetClaude Remy
  • Applicant Address: FR Limonest
  • Assignee: Solarforce
  • Current Assignee: Solarforce
  • Current Assignee Address: FR Limonest
  • Agency: Sofer & Haroun, LLP
  • Priority: FR0351203 20031224
  • International Application: PCT/FR2004/050674 WO 20041210
  • International Announcement: WO2005/064034 WO 20050714
  • Main IPC: B05C3/12
  • IPC: B05C3/12
Device for depositing a layer of polycrystalline silicon on a support
Abstract:
The present invention relates to a device (100) for depositing a layer based on polycrystalline silicon onto a substantially plane, elongate, moving support (4) having two longitudinal faces (43, 44) and two longitudinal side edges (41, 42), the device comprising: a crucible (1) containing a bath (2) of molten silicon, said support (4) being designed to be dipped at least in part in the bath and to pass substantially vertically in its long direction through the equilibrium surface (21) of the bath; and at least one edge control element (5, 5′), each edge control element being maintained substantially vertically close to one of the two longitudinal side edges (41, 42); each edge control element comprising walls (51 to 53′) defining a longitudinal slot (54, 54′) beside the corresponding longitudinal side edge, each slot being dipped in part in the bath (2) so as to raise the level of the bath by capillarity in the vicinity of the corresponding longitudinal side edge, the device being characterized in that at least one of the walls (51 to 52′), referred to as an “insertion” wall, facing part of one of the longitudinal faces, is substantially plane.
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