Invention Grant
US08256735B2 Supporting device for supporting vibration sensitive components 有权
支持振动敏感元件的支撑装置

Supporting device for supporting vibration sensitive components
Abstract:
The invention is in particular a supporting device for relative supporting loads with respect to a base comprising a load side part, a base side part, and an intermediate part giving support to the load side part, and thus defining a supporting direction with reference to the base and the load side, including a pressure chamber bounded by chamber walls.
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