Invention Grant
US08256774B2 Chucking member and spin head and method for chucking substrate using the chucking member
有权
夹头构件和旋转头以及使用夹紧构件夹持衬底的方法
- Patent Title: Chucking member and spin head and method for chucking substrate using the chucking member
- Patent Title (中): 夹头构件和旋转头以及使用夹紧构件夹持衬底的方法
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Application No.: US11896351Application Date: 2007-08-31
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Publication No.: US08256774B2Publication Date: 2012-09-04
- Inventor: Jung Keun Cho , Kyo-Woog Koo , Bo Ram Chan Sung
- Applicant: Jung Keun Cho , Kyo-Woog Koo , Bo Ram Chan Sung
- Applicant Address: KR Chungcheongnam-do
- Assignee: Semes Co., Ltd.
- Current Assignee: Semes Co., Ltd.
- Current Assignee Address: KR Chungcheongnam-do
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: KR10-2006-0087948 20060912
- Main IPC: B23B31/103
- IPC: B23B31/103
Abstract:
A chucking member configured to chuck the edge of a substrate includes a chucking pin which is eccentric from the rotation center. The chucking pin has a streamline shape and includes a first front-end portion disposed at the front end relative to the flow of an air current generated by the rotation of the substrate and a first back-end portion disposed at the back end relative to the flow of the air current. The first front-end portion includes a first tip, and the first front-end portion has a round shape.
Public/Granted literature
- US20080061519A1 Chucking member and spin head and method for chucking substrate using the chucking member Public/Granted day:2008-03-13
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