Invention Grant
US08257033B2 Production method of stator blade and turbo-molecular pump with the stator blade 有权
定子叶片和定子叶片的涡轮分子泵的生产方法

  • Patent Title: Production method of stator blade and turbo-molecular pump with the stator blade
  • Patent Title (中): 定子叶片和定子叶片的涡轮分子泵的生产方法
  • Application No.: US12061153
    Application Date: 2008-04-02
  • Publication No.: US08257033B2
    Publication Date: 2012-09-04
  • Inventor: Kouta Oishi
  • Applicant: Kouta Oishi
  • Applicant Address: JP Kyoto-Fu
  • Assignee: Shimadzu Corporation
  • Current Assignee: Shimadzu Corporation
  • Current Assignee Address: JP Kyoto-Fu
  • Agency: Sughrue Mion, PLLC
  • Priority: JP2007-163950 20070621
  • Main IPC: F04D29/44
  • IPC: F04D29/44
Production method of stator blade and turbo-molecular pump with the stator blade
Abstract:
Disclosed is a method of producing a stator blade for use in a turbo-molecular pump. The method includes subjecting a metal plate to a slitting process to form a blade element having an upstream edge surface and a downstream edge surface, wherein a laser beam is emitted onto the metal plate at an incident angle oblique to a principal surface of the metal plate. Thus, the upstream edge surface and/or the downstream edge surface can be formed to extend obliquely relative to the principal surface of the metal plate, in a simple manner, while eliminating a need for a burr removal operation which would otherwise be necessary in a punching-based slitting process.
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