Invention Grant
- Patent Title: Silicate composite polishing pad
- Patent Title (中): 硅酸复合抛光垫
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Application No.: US12945557Application Date: 2010-11-12
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Publication No.: US08257152B2Publication Date: 2012-09-04
- Inventor: Andrew R. Wank , Donna M. Alden , Joseph K. So , Robert Gargione , Mark E. Gazze , David Drop , Colin F. Cameron, Jr. , Mai Tieu Banh , Shawn Riley
- Applicant: Andrew R. Wank , Donna M. Alden , Joseph K. So , Robert Gargione , Mark E. Gazze , David Drop , Colin F. Cameron, Jr. , Mai Tieu Banh , Shawn Riley
- Applicant Address: US DE Newark
- Assignee: Rohm and Haas Electronic Materials CMP Holdings, Inc.
- Current Assignee: Rohm and Haas Electronic Materials CMP Holdings, Inc.
- Current Assignee Address: US DE Newark
- Agent Blake T. Biederman
- Main IPC: B24D11/00
- IPC: B24D11/00

Abstract:
The invention provides a polishing pad useful for polishing at least one of semiconductor, magnetic and optical substrates. It includes a polymeric matrix having a polishing surface. Polymeric microelements are distributed within the polymeric matrix and at the polishing surface of the polymeric matrix. Silicate-containing regions distributed within each of the polymeric microelements coat less than 50 percent of the outer surface of the polymeric microelements. Less than 0.1 weight percent total of the polymeric microelements are associated with i) silicate particles having a particle size of greater than 5 μm; ii) silicate-containing regions covering greater than 50 percent of the outer surface of the polymeric microelements; and iii) polymeric microelements agglomerated with silicate particles to an average cluster size of greater than 120 μm.
Public/Granted literature
- US20120122381A1 Silicate Composite Polishing Pad Public/Granted day:2012-05-17
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