Invention Grant
US08257496B1 Crucible weight measurement system for controlling feedstock introduction in Czochralski crystal growth
有权
用于控制Czochralski晶体生长中原料引入的坩埚重量测量系统
- Patent Title: Crucible weight measurement system for controlling feedstock introduction in Czochralski crystal growth
- Patent Title (中): 用于控制Czochralski晶体生长中原料引入的坩埚重量测量系统
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Application No.: US12315452Application Date: 2008-12-03
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Publication No.: US08257496B1Publication Date: 2012-09-04
- Inventor: David L. Bender , Gary Janik , Roy P. Crawford , David E. A. Smith
- Applicant: David L. Bender , Gary Janik , Roy P. Crawford , David E. A. Smith
- Applicant Address: US CA Santa Clara
- Assignee: Solaicx, Inc.
- Current Assignee: Solaicx, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Armstrong Teasdale LLP
- Main IPC: C30B35/00
- IPC: C30B35/00
Abstract:
A weighing system is provided for a continuous Czochralski process that accurately measures the weight of the crucible and melt during crystal growth to control the introduction of feedstock in order to keep the weight approximately constant. The system can measure the weight of the crucible while the crucible is rotating, and is insensitive to vibrations of the melt surface as well as variable torques on the crucible shaft induced by the rotation. The system also measures the weight of the crucible and its contents in order to control the amount of feedstock recharged after an ingot is withdrawn.
Information query
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