Invention Grant
US08257675B2 Artificial quartz member, process for producing the same, and optical element comprising the same 有权
人造石英构件,其制造方法以及包含该人造石英构件的光学元件

Artificial quartz member, process for producing the same, and optical element comprising the same
Abstract:
An object of the present invention is to provide an artificial quartz member inhibited from suffering the decrease in transmittance in a laser light wavelength region which is caused by long-term irradiation with a laser light having a wavelength of 200 nm or shorter; and a process for producing the artificial quartz member. The invention provides an artificial quartz member for use as an optical element to be irradiated with a laser light having a wavelength of 200 nm or shorter, having an aluminum content of 200 ppb or lower.
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