Invention Grant
US08258020B2 Interconnects for stacked non-volatile memory device and method 有权
用于堆叠非易失性存储器件和方法的互连

  • Patent Title: Interconnects for stacked non-volatile memory device and method
  • Patent Title (中): 用于堆叠非易失性存储器件和方法的互连
  • Application No.: US12939824
    Application Date: 2010-11-04
  • Publication No.: US08258020B2
    Publication Date: 2012-09-04
  • Inventor: Scott Brad Herner
  • Applicant: Scott Brad Herner
  • Applicant Address: US CA Santa Clara
  • Assignee: Crossbar Inc.
  • Current Assignee: Crossbar Inc.
  • Current Assignee Address: US CA Santa Clara
  • Agency: Ogawa P.C.
  • Main IPC: H01L29/04
  • IPC: H01L29/04
Interconnects for stacked non-volatile memory device and method
Abstract:
A method of forming a vertical interconnect for a memory device. The method includes providing a substrate having a surface region and defining a cell region, a first peripheral region, and a second peripheral region. A first thickness of dielectric material is formed overlying the surface region. A first bottom wiring structure spatially configured to extend in a first direction is formed overlying the first dielectric material for a first array of devices. A second thickness of a dielectric material is formed overlying the first wiring structure. The method includes forming an opening region in the first peripheral region. The opening region is configured to extend in a portion of at least the first thickness of dielectric material and the second thickness of dielectric material to expose a portion of the first wiring structure and to expose a portion of the substrate. A second bottom wiring material is formed overlying the second thickness of dielectric material and filling the opening region to form a vertical interconnect structure in the first peripheral region. A second bottom wiring structure is formed from the second wiring material for a second array of devices. The second bottom wiring structure is separated from the first bottom wiring structure by at least the second thickness of dielectric material and spatially configured to extend in the first direction. The first wiring structure and the second wiring structure are electrically connected by the vertical interconnect structure in the first peripheral region to a control circuitry on the substrate.
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