Invention Grant
- Patent Title: Method of manufacturing semiconductor memory
- Patent Title (中): 制造半导体存储器的方法
-
Application No.: US13076526Application Date: 2011-03-31
-
Publication No.: US08258038B2Publication Date: 2012-09-04
- Inventor: Katsuya Nozawa
- Applicant: Katsuya Nozawa
- Applicant Address: JP Osaka
- Assignee: Panasonic Corporation
- Current Assignee: Panasonic Corporation
- Current Assignee Address: JP Osaka
- Agency: Wenderoth, Lind & Ponack, L.L.P.
- Priority: JP2009-180296 20090803
- Main IPC: H01L21/02
- IPC: H01L21/02 ; H01L21/20

Abstract:
The method of manufacturing a semiconductor memory includes a process of forming a projection by performing an insulator forming process on the exposed side surface of a reactive conductive material and a non-reactive conductive material that are stacked above a substrate so as to change a predetermined length of the side surface of the reactive conductive material into an insulator, and thereby causing the side surface of the non-reactive conductive material to project outward from the side surface of the reactive its conductive material. The insulator forming process is an oxidation process or a nitridation process, the reactive conductive material is a material that reacts chemically and changes into the insulator in the oxidation process or nitridation process, and the non-reactive conductive material is a material that does not change into the insulator in the oxidation process or nitridation process.
Public/Granted literature
- US20110177666A1 METHOD OF MANUFACTURING SEMICONDUCTOR MEMORY Public/Granted day:2011-07-21
Information query
IPC分类: