Invention Grant
- Patent Title: Autofocus device with contrast enhancement
- Patent Title (中): 具有对比度增强功能的自动对焦设备
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Application No.: US12626082Application Date: 2009-11-25
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Publication No.: US08258448B2Publication Date: 2012-09-04
- Inventor: Tatsuya Nagahama , Kenji Okabe , Sadayuki Matsumiya
- Applicant: Tatsuya Nagahama , Kenji Okabe , Sadayuki Matsumiya
- Applicant Address: JP Kawasaki-shi
- Assignee: Mitutoyo Corporation
- Current Assignee: Mitutoyo Corporation
- Current Assignee Address: JP Kawasaki-shi
- Agency: Rankin, Hill & Clark LLP
- Priority: JP2008-304779 20081128
- Main IPC: G02B7/04
- IPC: G02B7/04 ; G06M7/00

Abstract:
An autofocus device includes an objective lens, an observation optical system, a driving mechanism that displaces the objective lens in an optical axis direction thereof, an illumination-optical-system optical path used to illuminate a measurement surface of a measurement object through the objective lens with light, and a pattern-projection-optical-system optical path. An electronic control shutter, a pattern projection plate having a predetermined pattern formed thereon, and a projection lens are provided in the pattern-projection-optical-system optical path.
Public/Granted literature
- US20100133417A1 AUTOFOCUS DEVICE Public/Granted day:2010-06-03
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