Invention Grant
- Patent Title: Nonvolatile semiconductor memory device and fabricating the same
- Patent Title (中): 非易失性半导体存储器件及其制造方法
-
Application No.: US12640182Application Date: 2009-12-17
-
Publication No.: US08258565B2Publication Date: 2012-09-04
- Inventor: Yoshio Ozawa
- Applicant: Yoshio Ozawa
- Applicant Address: JP Tokyo
- Assignee: Kabushiki Kaisha Toshiba
- Current Assignee: Kabushiki Kaisha Toshiba
- Current Assignee Address: JP Tokyo
- Agency: Finnegan, Henderson, Farabow, Garrett & Dunner, L.L.P.
- Priority: JPP2008-322705 20081218
- Main IPC: H01L29/788
- IPC: H01L29/788

Abstract:
There is provided a nonvolatile semiconductor memory device, including, a tunnel insulator, a floating gate electrode including a first floating gate electrode and a second floating gate electrode being constituted with a nondegenerate state semiconductor, an intergate insulating film formed to cover at least continuously an upper and a portion of a side surface of the floating gate electrode, and a control gate electrode in order, and an isolation insulating film, a lower portion of the isolation insulating film being embedded in the semiconductor substrate in both sides of the floating gate electrode along a channel width direction, an upper portion of the isolation insulating film contacting with a side surface of the first floating gate electrode and protruding to a level between an upper surface of the semiconductor substrate and an upper surface of the first floating gate electrode.
Public/Granted literature
- US20100155805A1 NONVOLATILE SEMICONDUCTOR MEMORY DEVICE AND FABRICATING THE SAME Public/Granted day:2010-06-24
Information query
IPC分类: