Invention Grant
- Patent Title: Surface acoustic wave sensor and system
- Patent Title (中): 表面声波传感器和系统
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Application No.: US12611298Application Date: 2009-11-03
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Publication No.: US08258674B2Publication Date: 2012-09-04
- Inventor: Viorel Olariu
- Applicant: Viorel Olariu
- Agency: Christensen O'Connor Johnson Kindness PLLC
- Main IPC: H01L41/08
- IPC: H01L41/08
Abstract:
A surface acoustic wave sensor to measure physical, biological or chemical parameters is claimed. Using different piezoelectric substrate materials, piezoelectric substrates with different thicknesses or metallizations with different thicknesses or patterns are used to distinguish between the effects of different physical, biological or chemical parameters.
Public/Granted literature
- US20110101822A1 Surface acoustic wave sensor and system Public/Granted day:2011-05-05
Information query
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