Invention Grant
- Patent Title: Detection sensor and resonator of detection sensor
- Patent Title (中): 检测传感器和谐振器的检测传感器
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Application No.: US13096409Application Date: 2011-04-28
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Publication No.: US08258675B2Publication Date: 2012-09-04
- Inventor: Tsuyoshi Ikehara , Mitsuo Konno , Takashi Mihara
- Applicant: Tsuyoshi Ikehara , Mitsuo Konno , Takashi Mihara
- Applicant Address: JP Tokyo JP Tokyo
- Assignee: National Institute of Advanced Industrial Science and Technology,Olympus Corporation
- Current Assignee: National Institute of Advanced Industrial Science and Technology,Olympus Corporation
- Current Assignee Address: JP Tokyo JP Tokyo
- Agency: Pearne & Gordon LLP
- Priority: JP2008-287018 20080711
- Main IPC: H01L41/08
- IPC: H01L41/08

Abstract:
A detection sensor (10) includes: plural beam-like resonators (30A, 30B), a vibration characteristic of which changes according to adsorption or sticking of a substance having a mass and one end of each of which is fixed; a driving unit (40) that vibrates the resonators; and a detecting unit (40) that detects a change in the vibration in the resonators to detect the substance. The plural resonators have lengths different from one another. When the length of an arbitrary resonator is represented as L, a difference ΔL between the length L and the length of the other resonators is set to satisfy the following condition: 2(ΔL/L)>1/Q (Q represents a Q factor of the resonators). The driving unit vibrates the respective plural resonators at frequencies corresponding to resonant frequencies of the resonators.
Public/Granted literature
- US20110266919A1 DETECTION SENSOR AND RESONATOR OF DETECTION SENSOR Public/Granted day:2011-11-03
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