Invention Grant
- Patent Title: Interferometer actuator
- Patent Title (中): 干涉仪执行器
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Application No.: US12596206Application Date: 2008-04-21
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Publication No.: US08259300B2Publication Date: 2012-09-04
- Inventor: Börkur Arnvidarson
- Applicant: Börkur Arnvidarson
- Applicant Address: DK Allerod
- Assignee: ChemoMetec A/S
- Current Assignee: ChemoMetec A/S
- Current Assignee Address: DK Allerod
- Agency: Gifford, Krass, Sprinkle, Anderson & Citkowski, P.C.
- Priority: DK200700569 20070418; DK200700740 20070518
- International Application: PCT/DK2008/050091 WO 20080421
- International Announcement: WO2008/128547 WO 20081030
- Main IPC: G01B9/02
- IPC: G01B9/02

Abstract:
The invention relates the movement of at least one movable means of an interferometer relative to the body of the interferometer. The system according to the invention, comprises at least two interferometer actuators, that can be operated individually, so that the at least two actuators are capable of moving the at least one movable means of the interferometer. When activating at least one of the at least two interferometer actuators the at least one movable means of the interferometer is moved with a minimum need for correcting for e.g. tilt. In a preferred configuration the system and the method according to the invention comprises three interferometer actuators that can be operated individually.
Public/Granted literature
- US20100149542A1 INTERFEROMETER ACTUATOR Public/Granted day:2010-06-17
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