Invention Grant
US08259305B2 Surface shape measuring system and surface shape measuring method using the same
有权
表面形状测量系统和使用其的表面形状测量方法
- Patent Title: Surface shape measuring system and surface shape measuring method using the same
- Patent Title (中): 表面形状测量系统和使用其的表面形状测量方法
-
Application No.: US12747763Application Date: 2008-12-10
-
Publication No.: US08259305B2Publication Date: 2012-09-04
- Inventor: Sang-yun Lee , MinGu Kang , Ssang-gun Lim
- Applicant: Sang-yun Lee , MinGu Kang , Ssang-gun Lim
- Applicant Address: KR Daejeon
- Assignee: Intekplus Co., Ltd.
- Current Assignee: Intekplus Co., Ltd.
- Current Assignee Address: KR Daejeon
- Agency: Kile Park Goekjian Reed & McManus PLLC
- Priority: KR10-2007-0131395 20071214
- International Application: PCT/KR2008/007314 WO 20081210
- International Announcement: WO2009/078617 WO 20090625
- Main IPC: G01B11/02
- IPC: G01B11/02

Abstract:
The surface shape measuring system includes an illumination unit including a main light source, a focusing lens, and a projection lens; a beam splitter to split illumination light emitted respectively irradiated onto a reference surface and a measurement surface; a light detecting element to capture an interference pattern; and a control computer to obtain surface shape data through white-light interference pattern analysis from an image captured and detect whether or not the measurement surface is defective from the obtained data, wherein a subsidiary light source to provide falling illumination to the target object; and two-dimensional data and three-dimensional data regarding the surface shape of the target object are obtained by selectively intermitting the turning-on of the main light source and the subsidiary light source and the irradiation of the illumination light onto the reference surface.
Public/Granted literature
- US20100259765A1 SURFACE SHAPE MEASURING SYSTEM AND SURFACE SHAPE MEASURING METHOD USING THE SAME Public/Granted day:2010-10-14
Information query