Invention Grant
US08260557B2 System and method for detecting particle generation source, and storage medium therefor
有权
用于检测粒子发生源的系统和方法及其存储介质
- Patent Title: System and method for detecting particle generation source, and storage medium therefor
- Patent Title (中): 用于检测粒子发生源的系统和方法及其存储介质
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Application No.: US12398523Application Date: 2009-03-05
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Publication No.: US08260557B2Publication Date: 2012-09-04
- Inventor: Tsuyoshi Moriya
- Applicant: Tsuyoshi Moriya
- Applicant Address: JP Tokyo
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Tokyo
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2008-056431 20080306
- Main IPC: G01N31/00
- IPC: G01N31/00 ; G06F17/18 ; G06F19/00
Abstract:
A system for determining occurrence factors of particles includes a user interface device, and an apparatus for detecting the occurrence factors of particles. The apparatus for detecting the occurrence factors of particles includes a storage unit that stores a program for executing a calculation method for calculating a likelihood of each of the occurrence factors of particles in the form of a score; and a calculation unit for calculating the score for each of the occurrence factors of particles based on particle distributions at least on a surface of a substrate using the stored program. The user interface device displays the calculated score for each of the occurrence factors of particles.
Public/Granted literature
- US20090228215A1 SYSTEM AND METHOD FOR DETECTING PARTICLE GENERATION SOURCE, AND STORAGE MEDIUM THEREFOR Public/Granted day:2009-09-10
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