A method for determining a dimension of a regular pattern of elements, wherein the elements in the regular pattern are arranged along an arrangement direction with a first spatial frequency includes providing a sensor for sampling the regular pattern; providing a plurality of data sample sets, wherein each data sample set includes data samples provided by the sensor while sampling over a portion of the regular pattern, and each data sample set consists of a different number of data samples; analyzing each data sample set to determine a corresponding spatial frequency; determining a plurality of quantified values, each quantified value being associated with a different one of the determined spatial frequencies; selecting a first quantified value from the plurality of quantified values; and determining the dimension based at least on the selected first quantified value.