Invention Grant
- Patent Title: Radiation source
- Patent Title (中): 辐射源
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Application No.: US12788903Application Date: 2010-05-27
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Publication No.: US08263950B2Publication Date: 2012-09-11
- Inventor: Wouter Anthon Soer , Maarten Marinus Johannes Wilhelmus Van Herpen , Kurt Gielissen , Martin Jacobus Johan Jak
- Applicant: Wouter Anthon Soer , Maarten Marinus Johannes Wilhelmus Van Herpen , Kurt Gielissen , Martin Jacobus Johan Jak
- Applicant Address: NL Veldhoven
- Assignee: ASML Netherlands B.V.
- Current Assignee: ASML Netherlands B.V.
- Current Assignee Address: NL Veldhoven
- Agency: Sterne, Kessler, Goldstein & Fox P.L.L.C
- Main IPC: G03B27/54
- IPC: G03B27/54 ; G21K5/00
Abstract:
A radiation source may include a radiation emitter for emitting radiation, a collector for collecting radiation emitted by the radiation emitter, and an outlet configured, in use, to introduce a cooled gas into the radiation source.
Public/Granted literature
- US20110128519A1 Radiation Source Public/Granted day:2011-06-02
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