Invention Grant
US08267582B2 Table guided by aerostatic bearing elements for vacuum application
有权
由空气静力轴承元件引导的真空应用表
- Patent Title: Table guided by aerostatic bearing elements for vacuum application
- Patent Title (中): 由空气静力轴承元件引导的真空应用表
-
Application No.: US12421798Application Date: 2009-04-10
-
Publication No.: US08267582B2Publication Date: 2012-09-18
- Inventor: Gerhard Schubert , Christian Jackel , Ulf-Carsten Kirschstein , Michael Boehm , René Bauer , Gerd Harnisch , Thomas Peschel , Stefan Risse , Christoph Schenk
- Applicant: Gerhard Schubert , Christian Jackel , Ulf-Carsten Kirschstein , Michael Boehm , René Bauer , Gerd Harnisch , Thomas Peschel , Stefan Risse , Christoph Schenk
- Applicant Address: DE Jena
- Assignee: Vistec Electron Beam GmbH
- Current Assignee: Vistec Electron Beam GmbH
- Current Assignee Address: DE Jena
- Agency: Patentbar International PC
- Priority: DE102008019681 20080411
- Main IPC: F16C32/06
- IPC: F16C32/06

Abstract:
A table for vacuum application which is guided by aerostatic bearing elements, having a fixedly mounted supporting structure and a tabletop which is displaceable in x-direction and y-direction with respect to the fixedly mounted supporting structure by means of slides. The slides are provided with the aerostatic bearing elements for guiding, these aerostatic bearing elements being connected to feed lines for supplying the gas required for the operation of the gas bearings and suction lines for removing this gas. The suction lines comprise at least one variable-length line arrangement having a first pipe member and a second pipe member which penetrate one inside the other without contacting, at least one sealing gap being provided between the pipe members.
Public/Granted literature
- US20090255447A1 TABLE GUIDED BY AEROSTATIC BEARING ELEMENTS FOR VACUUM APPLICATION Public/Granted day:2009-10-15
Information query