Invention Grant
- Patent Title: Substrate transport apparatus
- Patent Title (中): 基板运输装置
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Application No.: US12117355Application Date: 2008-05-08
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Publication No.: US08267636B2Publication Date: 2012-09-18
- Inventor: Christopher Hofmeister , Robert T. Caveney
- Applicant: Christopher Hofmeister , Robert T. Caveney
- Applicant Address: US MA Chelmsford
- Assignee: Brooks Automation, Inc.
- Current Assignee: Brooks Automation, Inc.
- Current Assignee Address: US MA Chelmsford
- Agency: Perman & Green, LLP
- Agent Colin C. Durham
- Main IPC: B25J18/00
- IPC: B25J18/00

Abstract:
A substrate transport apparatus including a first shaftless rotary motor including a first stator and a first rotor, the first stator being linearly distributed and the first rotor being coupled to a first arm, a second shaftless rotary motor including a second stator and second rotor, the second stator being linearly distributed and the second rotor being coupled to a second arm, the second arm being connected to the first arm and a first substrate support being coupled to at least one of the first and second arms, wherein the first stator and second stator are configured so that the first and second arms and the first substrate support are inside the stators and a motor output at a connection between the first and second shaftless rotary motors and a respective one of the first and second arms is a resultant force disposed peripheral to the first and second arms.
Public/Granted literature
- US20080298944A1 SUBSTRATE TRANSPORT APPARATUS Public/Granted day:2008-12-04
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