Invention Grant
- Patent Title: Apparatus and method for fabricating bonded substrate
- Patent Title (中): 用于制造键合衬底的装置和方法
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Application No.: US13067135Application Date: 2011-05-11
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Publication No.: US08268113B2Publication Date: 2012-09-18
- Inventor: Takanori Muramoto , Takuya Ohno , Tsukasa Adachi , Koji Hashizume , Yosimasa Miyajima , Takao Kojima
- Applicant: Takanori Muramoto , Takuya Ohno , Tsukasa Adachi , Koji Hashizume , Yosimasa Miyajima , Takao Kojima
- Applicant Address: JP Kawasaki
- Assignee: Fujitsu Limited
- Current Assignee: Fujitsu Limited
- Current Assignee Address: JP Kawasaki
- Agency: Staas & Halsey LLP
- Priority: JP2002-076173 20020319
- Main IPC: B29C65/78
- IPC: B29C65/78

Abstract:
A bonded-substrate fabricating apparatus capable of reducing defective bonded substrates fabricated. A transfer robot sucks the outer edge area of the bottom surface of a substrate and spouts gas toward the bottom surface of the substrate to carry the substrate into a vacuum process chamber of a press machine while keeping the substrate horizontally. A press plate holds the substrate, which is held by the transfer robot, by suction.
Public/Granted literature
- US20110214807A1 Apparatus and method for fabricating bonded substrate Public/Granted day:2011-09-08
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