Invention Grant
- Patent Title: High-strength sputtering target for forming protective film for optical recording medium
- Patent Title (中): 用于形成光记录介质保护膜的高强度溅射靶
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Application No.: US12303590Application Date: 2007-06-08
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Publication No.: US08268141B2Publication Date: 2012-09-18
- Inventor: Shoubin Zhang , Hayato Sasaki , Shozo Komiyama , Akifumi Mishima
- Applicant: Shoubin Zhang , Hayato Sasaki , Shozo Komiyama , Akifumi Mishima
- Applicant Address: JP Tokyo
- Assignee: Mitsubishi Materials Corporation
- Current Assignee: Mitsubishi Materials Corporation
- Current Assignee Address: JP Tokyo
- Agency: Leason Ellis LLP.
- Priority: JP2006-159303 20060608
- International Application: PCT/JP2007/061643 WO 20070608
- International Announcement: WO2007/142333 WO 20071213
- Main IPC: C23C14/34
- IPC: C23C14/34 ; C01B33/20 ; C01B33/46

Abstract:
A high-strength sputtering target for forming a protective film for an optical recording medium, obtained by sintering a mixed powder containing, in mol %, 10 to 70% of a zirconium oxide or hafnium oxide and 50% or less (over 0%) of silicon dioxide, and 0.1 to 8.4% of yttrium oxide as necessary, and the remainder containing aluminum oxide, lanthanum oxide, or indium oxide and inevitable impurities, wherein a complex oxide phase of Al6Si2O13, La2SiO5, or In2Si2O7 is formed in a base of the target.
Public/Granted literature
- US20100170785A1 HIGH-STRENGTH SPUTTERING TARGET FOR FORMING PROTECTIVE FILM FOR OPTICAL RECORDING MEDIUM Public/Granted day:2010-07-08
Information query
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