Invention Grant
- Patent Title: Copper electroplating solutions with halides
- Patent Title (中): 铜电镀溶液与卤化物
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Application No.: US12573762Application Date: 2009-10-05
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Publication No.: US08268155B1Publication Date: 2012-09-18
- Inventor: Jian Zhou , Jonathan D. Reid
- Applicant: Jian Zhou , Jonathan D. Reid
- Applicant Address: US CA San Jose
- Assignee: Novellus Systems, Inc.
- Current Assignee: Novellus Systems, Inc.
- Current Assignee Address: US CA San Jose
- Agency: Weaver Austin Villeneuve & Sampson LLP
- Main IPC: C25D5/02
- IPC: C25D5/02 ; C25D3/38

Abstract:
Methods, electroplating solution, and apparatuses for electroplating copper into a surface of a partially fabricated semiconductor substrate are provided. Electroplating solutions include copper ions, suppressor additives, chloride ions, and alternative halide ions, which include bromide ions and/or iodide ions. The concentration of the alternative halide ions in the solution may be between about 0.25 ppm and 20 ppm. Addition of the alternative halide ions at certain concentrations improves suppression properties of the solution over a range of feature sizes without a need to change suppressors.
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