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US08268407B2 Method for manufacturing a perpendicular magnetic write head having write pole 有权
具有写极的垂直磁写头的制造方法

Method for manufacturing a perpendicular magnetic write head having write pole
Abstract:
A method for manufacturing a write head having write pole with a tapered upper surface to improve the channeling of magnetic flux to a pole tip of the write pole. The method includes depositing a first layer of magnetic material over a substrate. A CMP stop layer, image transfer layer and mask structure are deposited over the first magnetic layer, the mask structure being formed with an edge located a desired distance from an air bearing surface plane. An ion milling operation is performed to remove portions of the magnetic layer that are not protected by the mask structure, the ion milling being performed in a manner to form a tapered surface on the first magnetic layer. Then, a second magnetic layer is deposited over the first magnetic layer to form a tapered magnetic write pole.
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