Invention Grant
- Patent Title: NAND flash memory device and method of manufacturing the same
- Patent Title (中): NAND闪存器件及其制造方法
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Application No.: US13069273Application Date: 2011-03-22
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Publication No.: US08268685B2Publication Date: 2012-09-18
- Inventor: Jae Chul Om , Nam Kyeong Kim , Se Jun Kim
- Applicant: Jae Chul Om , Nam Kyeong Kim , Se Jun Kim
- Applicant Address: KR Icheon-si
- Assignee: Hynix Semiconductor Inc.
- Current Assignee: Hynix Semiconductor Inc.
- Current Assignee Address: KR Icheon-si
- Agency: Kilpatrick Townsend & Stockton LLP
- Priority: KR10-2005-59869 20050704
- Main IPC: H01L21/336
- IPC: H01L21/336

Abstract:
A NAND flash memory device and method of manufacturing the same is disclosed. Source and drain select transistor gates are recessed lower than an active region of a semiconductor substrate. A valid channel length of the source and drain select transistor gates is longer than a channel length of memory cell gates. Accordingly, an electric field between a source region and a drain region of the select transistor can be reduced. It is thus possible to prevent program disturbance from occurring in edge memory cells adjacent to the source and drain select transistors in non-selected cell strings.
Public/Granted literature
- US20110171797A1 NAND FLASH MEMORY DEVICE AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2011-07-14
Information query
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