Invention Grant
- Patent Title: Method of manufacturing nonvolatile memory device
- Patent Title (中): 制造非易失性存储器件的方法
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Application No.: US12869904Application Date: 2010-08-27
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Publication No.: US08268713B2Publication Date: 2012-09-18
- Inventor: Hajime Yamagishi , Mitsuharu Shoji , Kiyotaka Tabuchi
- Applicant: Hajime Yamagishi , Mitsuharu Shoji , Kiyotaka Tabuchi
- Applicant Address: JP Tokyo
- Assignee: Sony Corporation
- Current Assignee: Sony Corporation
- Current Assignee Address: JP Tokyo
- Agency: SNR Denton US LLP
- Priority: JP2009-204528 20090904
- Main IPC: H01L21/44
- IPC: H01L21/44

Abstract:
A method of manufacturing a nonvolatile memory device having a laminated structure in which a first magnetic material layer, a tunnel insulator film, and a second magnetic material layer are sequentially laminated, in which information is stored when an electric resistance value changes depending on a magnetization reversal state is disclosed. The method includes the steps of: sequentially forming the first magnetic material layer, the tunnel insulator film, and the second magnetic material layer; forming a mask layer on the second magnetic material layer; oxidizing a part uncovered by the mask layer of the second magnetic material layer; and reducing the oxidized part of the second magnetic material layer.
Public/Granted literature
- US20110059557A1 METHOD OF MANUFACTURING NONVOLATILE MEMORY DEVICE Public/Granted day:2011-03-10
Information query
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