Invention Grant
- Patent Title: Localized anneal
- Patent Title (中): 定位退火
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Application No.: US12537268Application Date: 2009-08-07
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Publication No.: US08268733B2Publication Date: 2012-09-18
- Inventor: Dexter Tan , Chee Chong Lim , Sai Hooi Yeong , Chee Mang Ng
- Applicant: Dexter Tan , Chee Chong Lim , Sai Hooi Yeong , Chee Mang Ng
- Applicant Address: SG Singapore SG Singapore SG Singapore
- Assignee: Nanyang Technological University,National University of Singapore,Globalfoundries Singapore Pte. Ltd.
- Current Assignee: Nanyang Technological University,National University of Singapore,Globalfoundries Singapore Pte. Ltd.
- Current Assignee Address: SG Singapore SG Singapore SG Singapore
- Agency: Horizon IP Pte Ltd
- Main IPC: H01L21/263
- IPC: H01L21/263

Abstract:
A method of forming a device is presented. The method includes providing a wafer having an active surface and dividing the wafer into a plurality of portions. The wafer is selectively processed by localized heating of a first of the plurality of portions. The wafer is then repeatedly selectively processed by localized heating of a next of the plurality of portions until all plurality of portions have been selectively processed.
Public/Granted literature
- US20110034040A1 LOCALIZED ANNEAL Public/Granted day:2011-02-10
Information query
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