Invention Grant
- Patent Title: Link processing with high speed beam deflection
- Patent Title (中): 链接处理与高速光束偏转
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Application No.: US12233476Application Date: 2008-09-18
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Publication No.: US08269137B2Publication Date: 2012-09-18
- Inventor: Jonathan S. Ehrmann , Joseph J. Griffiths , James J. Cordingley , Donald J. Svetkoff , Shepard D. Johnson , Michael Plotkin
- Applicant: Jonathan S. Ehrmann , Joseph J. Griffiths , James J. Cordingley , Donald J. Svetkoff , Shepard D. Johnson , Michael Plotkin
- Applicant Address: US MA Bedford
- Assignee: GSI Group Corporation
- Current Assignee: GSI Group Corporation
- Current Assignee Address: US MA Bedford
- Agency: Knobbe, Martens, Olson & Bear LLP
- Main IPC: B23K26/36
- IPC: B23K26/36
Abstract:
The present invention relates to the field of laser processing methods and systems, and specifically, to laser processing methods and systems for laser processing multi-material devices. Systems and methods may utilize high speed deflectors to improve processing energy window and/or improve processing speed. In some embodiments, a deflector is used for non-orthogonal scanning of beam spots. In some embodiment, a deflector is used to implement non-synchronous processing of target structures.
Public/Granted literature
- US20090095722A1 LINK PROCESSING WITH HIGH SPEED BEAM DEFLECTION Public/Granted day:2009-04-16
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