Invention Grant
- Patent Title: Radiation detector
- Patent Title (中): 辐射检测器
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Application No.: US13331140Application Date: 2011-12-20
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Publication No.: US08269186B2Publication Date: 2012-09-18
- Inventor: Wilhelmus Jacobus Maria Rooijakkers , Martijn Gerard Dominique Wehrens
- Applicant: Wilhelmus Jacobus Maria Rooijakkers , Martijn Gerard Dominique Wehrens
- Applicant Address: NL Veldhoven
- Assignee: ASML Netherlands B.V.
- Current Assignee: ASML Netherlands B.V.
- Current Assignee Address: NL Veldhoven
- Agency: Sterne, Kessler, Goldstein & Fox P.L.L.C.
- Main IPC: G01J1/42
- IPC: G01J1/42
Abstract:
A method for detecting radiation. The radiation detector includes a plurality of Faraday cups. Each Faraday cup being provided with a cover. Each cover comprising a window arrangement through which the radiation may pass into the Faraday cup. The window arrangement of each cover being different for each Faraday cup. Each Faraday cup housing a target configured to emit photoelectrons if the radiation is incident upon the target.
Public/Granted literature
- US20120091357A1 Radiation Detector Public/Granted day:2012-04-19
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