Invention Grant
- Patent Title: Apparatus for measuring dielectric properties of parts
- Patent Title (中): 用于测量零件介电性能的装置
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Application No.: US12240291Application Date: 2008-09-29
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Publication No.: US08269510B2Publication Date: 2012-09-18
- Inventor: Jaehyun Kim , Arthur H. Sato , Keith Comendant , Qing Liu , Feiyang Wu
- Applicant: Jaehyun Kim , Arthur H. Sato , Keith Comendant , Qing Liu , Feiyang Wu
- Applicant Address: US CA Fremont
- Assignee: Lam Research Corporation
- Current Assignee: Lam Research Corporation
- Current Assignee Address: US CA Fremont
- Agency: Martine Penilla Group, LLP
- Main IPC: G01R27/26
- IPC: G01R27/26

Abstract:
A chamber formed from an electrically conductive material is connected to a ground potential. A hot electrode formed from an electrically conductive material is disposed within the chamber in a substantially horizontal orientation and is physically separated from the chamber. The hot electrode includes a top surface defined to support a part to be measured. A radiofrequency (RF) transmission rod is connected to extend from a bottom surface of the hot electrode through an opening in a bottom of the chamber and be physically separated from the chamber. The RF transmission rod is defined to transmit RF power from a conductor plate in an electrical components housing to the hot electrode. An upper electrode formed from an electrically conductive material is disposed within the chamber in a substantially horizontal orientation. The upper electrode is electrically connected to the chamber and is defined to be movable in a vertical direction.
Public/Granted literature
- US20090091340A1 Apparatus for Measuring Dielectric Properties of Parts Public/Granted day:2009-04-09
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