Invention Grant
- Patent Title: Gyroscope utilizing MEMS and optical sensing
- Patent Title (中): 陀螺仪利用MEMS和光学感测
-
Application No.: US12770545Application Date: 2010-04-29
-
Publication No.: US08269976B2Publication Date: 2012-09-18
- Inventor: Onur Kilic , Michel J. F. Digonnet , Gordon S. Kino , Olav Solgaard
- Applicant: Onur Kilic , Michel J. F. Digonnet , Gordon S. Kino , Olav Solgaard
- Applicant Address: US CA Palo Alto
- Assignee: The Board of Trustees of the Leland Stanford Junior University
- Current Assignee: The Board of Trustees of the Leland Stanford Junior University
- Current Assignee Address: US CA Palo Alto
- Agency: Knobbe, Martens, Olson & Bear LLP
- Main IPC: G01C19/72
- IPC: G01C19/72 ; G01C19/00 ; G01B9/02 ; G01P9/00 ; G01P15/14

Abstract:
A gyroscope and a method of detecting rotation are provided. The gyroscope includes a structure configured to be driven to move about a drive axis. The structure is further configured to move about a sense axis in response to a Coriolis force generated by rotation of the structure about a rotational axis while moving about the drive axis. The gyroscope further includes an optical sensor system configured to optically measure movement of the structure about the sense axis. In certain embodiments, the gyroscope is a microelectromechanical system (MEMS) gyroscope.
Public/Granted literature
- US20100309474A1 GYROSCOPE UTILIZING MEMS AND OPTICAL SENSING Public/Granted day:2010-12-09
Information query
IPC分类: