Invention Grant
US08269983B2 Apparatus for observing the surface of a sample 有权
用于观察样品表面的装置

Apparatus for observing the surface of a sample
Abstract:
An apparatus for observing the appearance of a surface of a sample of semitransparent material, the apparatus comprising a light source for illuminating at least a region of interest of the surface of the sample from a predetermined direction and means for observing a response to the illumination of the region of interest, wherein the illuminated region comprises the region of interest and a region surrounding the region of interest. In this way the influence of emitted scattered light on the accuracy of the observation of the appearance of the sample is minimized.
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