Invention Grant
- Patent Title: Polarization-modulating optical element
- Patent Title (中): 极化调制光学元件
-
Application No.: US11440479Application Date: 2006-05-25
-
Publication No.: US08270077B2Publication Date: 2012-09-18
- Inventor: Damian Fiolka , Markus Deguenther
- Applicant: Damian Fiolka , Markus Deguenther
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMT GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Fish & Richardson P.C.
- Main IPC: G02B5/30
- IPC: G02B5/30 ; G02B27/28

Abstract:
An optical arrangement includes a polarization-modulating optical element and a compensation plate is disclosed. The polarization-modulating optical element includes a first optically active material having a first specific rotation with a sign, the polarization-modulating optical element having a first optical axis. The polarization-modulating element has a first thickness profile that, as measured in the direction of the first optical axis, that is variable. The compensation plate includes a second optically active material having a second specific rotation with a sign opposite the sign of the first specific rotation. The compensation plate has a second thickness profile configured so that, when radiation passes through the optical arrangement, the compensation plate substantially compensates for angle deviations of the radiation that are caused by the polarization-modulating optical element.
Public/Granted literature
- US20060291057A1 Polarization-modulating optical element Public/Granted day:2006-12-28
Information query