Invention Grant
US08270788B2 Optical devices and digital laser method for writing waveguides, gratings, and integrated optical circuits
有权
用于写入波导,光栅和集成光电路的光学器件和数字激光方法
- Patent Title: Optical devices and digital laser method for writing waveguides, gratings, and integrated optical circuits
- Patent Title (中): 用于写入波导,光栅和集成光电路的光学器件和数字激光方法
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Application No.: US12301496Application Date: 2007-05-18
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Publication No.: US08270788B2Publication Date: 2012-09-18
- Inventor: Peter R. Herman , Haibin Zhang
- Applicant: Peter R. Herman , Haibin Zhang
- International Application: PCT/CA2007/000875 WO 20070518
- International Announcement: WO2007/134438 WO 20071129
- Main IPC: G02B6/34
- IPC: G02B6/34 ; B29D11/00 ; C03B37/018 ; H01L21/00

Abstract:
The invention relates to devices having periodic refractive index modulation structures and fabrication methods for the devices using a laser means. By focusing a pulsed laser beam into a transparent material substrate, a path of laser modified volumes can be formed with modified refractive index compared with the unprocessed material. By selecting appropriate laser parameters and relative scan speed, the laser modified path defines an optical waveguide. Separation distance of the individual modified volumes define a periodic modification pattern along the waveguide path, so that the waveguide structures also exhibit grating responses, for example, as spectral filters, Bragg reflectors, grating couplers, grating sensors, or other devices. This method of direct laser fabrication enables one-step fabrication and integration of periodic or aperiodic refractive-index modulation devices together with optical waveguiding properties to enable low-cost, multifunctional 1D, 2D or 3D optical circuit fabrication for simple and complex applications.
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