Invention Grant
US08273647B2 Methods of forming patterns, and methods of forming integrated circuits
有权
形成图案的方法,以及形成集成电路的方法
- Patent Title: Methods of forming patterns, and methods of forming integrated circuits
- Patent Title (中): 形成图案的方法,以及形成集成电路的方法
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Application No.: US13288609Application Date: 2011-11-03
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Publication No.: US08273647B2Publication Date: 2012-09-25
- Inventor: Dan Millward , Scott E. Sills
- Applicant: Dan Millward , Scott E. Sills
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Wells St. John P.S.
- Main IPC: H01L21/3205
- IPC: H01L21/3205 ; H01L21/4763

Abstract:
Some embodiments include methods of forming patterns in substrates by utilizing block copolymer assemblies as patterning materials. A block copolymer assembly may be formed over a substrate, with the assembly having first and second subunits arranged in a pattern of two or more domains. Metal may be selectively coupled to the first subunits relative to the second subunits to form a pattern of metal-containing regions and non-metal-containing regions. At least some of the block copolymer may be removed to form a patterned mask corresponding to the metal-containing regions. A pattern defined by the patterned mask may be transferred into the substrate with one or more etches. In some embodiments, the patterning may be utilized to form integrated circuitry, such as, for example, gatelines.
Public/Granted literature
- US20120045891A1 Methods Of Forming Patterns, And Methods Of Forming Integrated Circuits Public/Granted day:2012-02-23
Information query
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