Invention Grant
- Patent Title: Method for fabricating wiring structure of wiring board
- Patent Title (中): 布线板布线结构的制作方法
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Application No.: US12815155Application Date: 2010-06-14
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Publication No.: US08273651B2Publication Date: 2012-09-25
- Inventor: Shu-Sheng Chiang , Tsung-Yuan Chen , Wei-Ming Cheng
- Applicant: Shu-Sheng Chiang , Tsung-Yuan Chen , Wei-Ming Cheng
- Applicant Address: TW Taoyuan
- Assignee: Unimicron Technology Corp.
- Current Assignee: Unimicron Technology Corp.
- Current Assignee Address: TW Taoyuan
- Agency: Morris Manning & Martin LLP
- Agent Tim Tingkang Xia, Esq.
- Priority: TW98144177A 20091222
- Main IPC: H01L21/4763
- IPC: H01L21/4763

Abstract:
A method for fabricating a wiring structure of a wiring board is provided. First, a substrate including an insulation layer and a film disposed on the insulation layer is provided. Next, an intaglio pattern exposing the insulation layer is formed on an outer surface of the film. The intaglio pattern is formed by removing a portion of the insulation layer and a portion of the film. Next, an activated layer is formed on the outer surface and in the intaglio pattern. The activated layer completely covers the outer surface and all surfaces of the intaglio pattern. Then, the film and the activated layer on the outer surface are removed, and the activated layer in the intaglio pattern is remained. After the film and the activated layer on the outer surface are removed, a conductive material is formed in the intaglio pattern by chemical deposition method.
Public/Granted literature
- US20110147342A1 METHOD FOR FABRICATING WIRING STRUCTURE OF WIRING BOARD Public/Granted day:2011-06-23
Information query
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