Invention Grant
- Patent Title: Reduction of edge effects from aspect ratio trapping
- Patent Title (中): 从纵横比捕获中减少边缘效应
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Application No.: US12495161Application Date: 2009-06-30
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Publication No.: US08274097B2Publication Date: 2012-09-25
- Inventor: Zhiyuan Cheng
- Applicant: Zhiyuan Cheng
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Slater & Matsil, L.L.P.
- Main IPC: H01L21/02
- IPC: H01L21/02

Abstract:
A device includes a crystalline material within an area confined by an insulator. In one embodiment, the area confined by the insulator is an opening in the insulator having an aspect ratio sufficient to trap defects using an ART technique. Method and apparatus embodiments of the invention can reduce edge effects in semiconductor devices. Embodiments of the invention can provide a planar surface over a buffer layer between a plurality of uncoalesced ART structures.
Public/Granted literature
- US20100025683A1 REDUCTION OF EDGE EFFECTS FROM ASPECT RATION TRAPPING Public/Granted day:2010-02-04
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