Invention Grant
- Patent Title: Tomographic atom probe comprising an electro-optical generator of high-voltage electrical pulses
- Patent Title (中): 断层原子探针包括高电压电脉冲的电光发生器
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Application No.: US13130520Application Date: 2009-10-13
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Publication No.: US08276210B2Publication Date: 2012-09-25
- Inventor: François Vurpillot , Alain Bostel
- Applicant: François Vurpillot , Alain Bostel
- Applicant Address: FR Gennevilliers FR Paris
- Assignee: Cameca,CNRS
- Current Assignee: Cameca,CNRS
- Current Assignee Address: FR Gennevilliers FR Paris
- Agency: Baker & Hostetler LLP
- Priority: FR0806550 20081121
- International Application: PCT/EP2009/063346 WO 20091013
- International Announcement: WO2010/057721 WO 20100527
- Main IPC: G01Q60/00
- IPC: G01Q60/00

Abstract:
A tomographic atom probe uses electrical pulses applied to an electrode in order to carry out evaporation of the sample being analyzed. In order to produce these electrical pulses, the tomographic atom probe comprises a high-voltage generator connected to an electrode by an electrical connection comprising a chip of semiconductor material. The probe also comprises a light source which can be controlled in order to generate light pulses which are applied to the semiconductor chip. Throughout the illumination, the chip is rendered conductive, which puts the high-voltage generator and the electrode in electrical contact so that a potential step is applied to the latter. The probe also comprises means for applying a voltage step of opposite amplitude to the previous step at the end of a time interval Δt0, so that the electrode finally receives a voltage pulse of duration Δt0.
Public/Granted literature
- US20110260046A1 Tomographic Atom Probe Comprising an Electro-Optical Generator of High-Voltage Electrical Pulses Public/Granted day:2011-10-27
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