Invention Grant
US08276250B2 Method of manufacturing a piezoelectric ink jet device 有权
制造压电喷墨装置的方法

Method of manufacturing a piezoelectric ink jet device
Abstract:
A method of manufacturing a piezoelectric ink jet device having a pressure chamber, a flexible membrane delimiting the pressure chamber, a piezoelectric actuator mounted on the membrane, and a rigid substrate attached to the side of the membrane carrying the actuator, which includes the steps of providing the piezoelectric actuator with an electrode on at least one side, attaching the actuator with its electrode side to a carrier plate, bonding the rigid substrate to the side of the carrier plate carrying the actuator, and removing material from the carrier plate on the side opposite to the actuator and leaving only a thin layer of the carrier plate which then forms the membrane.
Public/Granted literature
Information query
Patent Agency Ranking
0/0