Invention Grant
- Patent Title: Magnetically coupled thin-wafer handling system
- Patent Title (中): 磁耦合薄晶片处理系统
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Application No.: US12327726Application Date: 2008-12-03
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Publication No.: US08276262B2Publication Date: 2012-10-02
- Inventor: Jeff Wienrich , Charles Singleton
- Applicant: Jeff Wienrich , Charles Singleton
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Winkle, PLLC
- Main IPC: B23P19/00
- IPC: B23P19/00 ; H01R43/042 ; H05K13/04

Abstract:
Aspects of the present disclosure may include an apparatus for enclosing a thin wafer to prevent damage during an on-going manufacture of integrated circuit chip(s) on or in the thin wafer, and methods of utilizing the apparatus. The apparatus may include a lower support assembly and an upper retainer assembly which retains a thin wafer therebetween, wherein the lower support assembly and the upper retainer assembly may be coupled together by a magnetic attractive force.
Public/Granted literature
- US20100135764A1 MAGNETICALLY COUPLED THIN-WAFER HANDLING SYSTEM Public/Granted day:2010-06-03
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