Invention Grant
US08276262B2 Magnetically coupled thin-wafer handling system 有权
磁耦合薄晶片处理系统

Magnetically coupled thin-wafer handling system
Abstract:
Aspects of the present disclosure may include an apparatus for enclosing a thin wafer to prevent damage during an on-going manufacture of integrated circuit chip(s) on or in the thin wafer, and methods of utilizing the apparatus. The apparatus may include a lower support assembly and an upper retainer assembly which retains a thin wafer therebetween, wherein the lower support assembly and the upper retainer assembly may be coupled together by a magnetic attractive force.
Public/Granted literature
Information query
Patent Agency Ranking
0/0