Invention Grant
- Patent Title: Transport pod interface
- Patent Title (中): 运输pod接口
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Application No.: US12114271Application Date: 2008-05-02
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Publication No.: US08276432B2Publication Date: 2012-10-02
- Inventor: Erwan Godot
- Applicant: Erwan Godot
- Applicant Address: FR Paris
- Assignee: Alcatel Lucent
- Current Assignee: Alcatel Lucent
- Current Assignee Address: FR Paris
- Agency: Carmen Patti Law Group, LLC
- Priority: FR0754852 20070504
- Main IPC: G01N7/00
- IPC: G01N7/00 ; H01L21/677

Abstract:
A transport pod interface in one example including a sampling probe connected to a gas analyzer and an actuator coupled with an access door on the transport pod in the coupling position, and that moves said door towards the base of the interface in an retracted position in which the volume of gas to be analyzed contained within the transport pod is accessible by the sampling probe, characterized in that it includes at least one sealing joint configured such that at least when the interface is in the retracted position, the space between the actuator and said base is sealed in such a way as to isolate the volume of gas to be analyzed.
Public/Granted literature
- US20080276685A1 TRANSPORT POD INTERFACE Public/Granted day:2008-11-13
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