Invention Grant
- Patent Title: Surface texture measuring instrument and measuring method
- Patent Title (中): 表面纹理测量仪和测量方法
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Application No.: US12510401Application Date: 2009-07-28
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Publication No.: US08276435B2Publication Date: 2012-10-02
- Inventor: Toshihiro Kanematsu , Hideki Mishima , Nobuyuki Hama
- Applicant: Toshihiro Kanematsu , Hideki Mishima , Nobuyuki Hama
- Applicant Address: JP Kawasaki-shi
- Assignee: Mitutoyo Corporation
- Current Assignee: Mitutoyo Corporation
- Current Assignee Address: JP Kawasaki-shi
- Agency: Rankin, Hill & Clark LLP
- Priority: JP2008-193884 20080728
- Main IPC: G01B5/20
- IPC: G01B5/20 ; G01B5/28 ; G01B21/30

Abstract:
A surface texture measuring instrument includes: a measuring device that includes a detector for detecting surface texture of a workpiece and an X-axis movement mechanism for moving the detector in a measurement direction; an elevation inclination adjuster capable of adjusting an elevation position and an inclination angle of a table on which the measuring device is mounted; a stage on which the workpiece is mounted; and a controller that controls the measuring device and the elevation inclination adjuster. The controller includes: a measurement controller that controls the X-axis movement mechanism to conduct a preliminary measurement and main measurement of the workpiece; a computing unit that acquires a result of the preliminary measurement from the detector and obtains an inclination angle of the workpiece at which the workpiece is inclined to the measurement direction; and a positioning controller for adjusting the inclination angle of the table based on the obtained inclination angle.
Public/Granted literature
- US20100018298A1 SURFACE TEXTURE MEASURING INSTRUMENT AND MEASURING METHOD Public/Granted day:2010-01-28
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