Invention Grant
US08276449B2 Acceleration sensor and method of manufacturing acceleration sensor
有权
加速度传感器及加速度传感器的制造方法
- Patent Title: Acceleration sensor and method of manufacturing acceleration sensor
- Patent Title (中): 加速度传感器及加速度传感器的制造方法
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Application No.: US12585553Application Date: 2009-09-17
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Publication No.: US08276449B2Publication Date: 2012-10-02
- Inventor: Goro Nakatani
- Applicant: Goro Nakatani
- Applicant Address: JP Kyoto
- Assignee: Rohm Co., Ltd.
- Current Assignee: Rohm Co., Ltd.
- Current Assignee Address: JP Kyoto
- Agency: Rabin & Berdo, P.C.
- Priority: JP2008-239553 20080918
- Main IPC: G01P15/12
- IPC: G01P15/12 ; G01P15/00
Abstract:
The acceleration sensor according to the present invention includes a sensor chip having a movable portion operating in response to a change in a physical quantity and a silicon chip arranged to be opposed to a first side of the sensor chip and bonded to the sensor chip, while the sensor chip is provided with a penetrating portion penetrating the sensor chip in the thickness direction so that the first side is visually recognizable from a second side of the sensor chip, and the silicon chip is provided with an alignment mark on a portion opposed to the penetrating portion.
Public/Granted literature
- US20100064808A1 Acceleration sensor and method of manufacturing acceleration sensor Public/Granted day:2010-03-18
Information query
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