Invention Grant
US08277031B2 Liquid-ejecting head, liquid-ejecting apparatus, and actuator 有权
液体喷射头,液体喷射装置和致动器

  • Patent Title: Liquid-ejecting head, liquid-ejecting apparatus, and actuator
  • Patent Title (中): 液体喷射头,液体喷射装置和致动器
  • Application No.: US12754675
    Application Date: 2010-04-06
  • Publication No.: US08277031B2
    Publication Date: 2012-10-02
  • Inventor: Koji Sumi
  • Applicant: Koji Sumi
  • Applicant Address: JP Tokyo
  • Assignee: Seiko Epson Corporation
  • Current Assignee: Seiko Epson Corporation
  • Current Assignee Address: JP Tokyo
  • Agency: Workman Nydegger
  • Priority: JP2009-093472 20090407
  • Main IPC: B41J2/045
  • IPC: B41J2/045
Liquid-ejecting head, liquid-ejecting apparatus, and actuator
Abstract:
A liquid-ejecting head includes a flow-passage-forming substrate that includes a pressure-generating chamber, the pressure-generating chamber being in communication with a nozzle through which droplets are ejected, and a piezoelectric element disposed on the flow-passage-forming substrate, the piezoelectric element altering the internal pressure of the pressure-generating chamber. The piezoelectric element includes a piezoelectric layer containing titanium (Ti) and zirconium (Zr), a first electrode, and a second electrode. The first electrode and the second electrode are disposed on the opposite sides of the piezoelectric layer,. The component ratio Ti/(Zr+Ti) of the piezoelectric layer is 0.40 or more but less than 0.50. At least a portion of the piezoelectric layer formed on the first electrode contains tetragonal crystals formed by phase transition under stress caused by an underlying layer.
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