Invention Grant
- Patent Title: Chemical vapor deposition apparatus
- Patent Title (中): 化学气相沉积装置
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Application No.: US12257131Application Date: 2008-10-23
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Publication No.: US08277561B2Publication Date: 2012-10-02
- Inventor: Changsung Sean Kim , Chang Hwan Choi , Jong Pa Hong , Joong El Kim
- Applicant: Changsung Sean Kim , Chang Hwan Choi , Jong Pa Hong , Joong El Kim
- Applicant Address: KR Seoul
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Seoul
- Agency: McDermott Will & Emery LLP
- Priority: KR10-2008-0036094 20080418
- Main IPC: C23C16/455
- IPC: C23C16/455 ; C23C16/06 ; C23C16/22

Abstract:
There is provided a chemical vapor deposition apparatus improved in structure such that a reaction gas introduced into a reactor where deposition is performed flows at a substantially uniform rate to ensure a thin film is grown substantially uniformly on the deposition object. The chemical vapor deposition apparatus includes: a chamber; a reactor provided in the chamber to have a deposition object deposited therein; and a reservoir storing a reaction gas fed from the outside to introduce the reaction gas to the reactor, the reservoir having a cross-sectional area changing according to a flow path of the introduced reaction gas.
Public/Granted literature
- US20090260569A1 CHEMICAL VAPOR DEPOSITION APPARATUS Public/Granted day:2009-10-22
Information query
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