Invention Grant
US08277603B2 Move mechanism for moving target object and charged particle beam writing apparatus
有权
移动目标物体和带电粒子束写入装置的移动机构
- Patent Title: Move mechanism for moving target object and charged particle beam writing apparatus
- Patent Title (中): 移动目标物体和带电粒子束写入装置的移动机构
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Application No.: US11649753Application Date: 2007-01-05
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Publication No.: US08277603B2Publication Date: 2012-10-02
- Inventor: Shuichi Tamamushi , Shuichiro Fukutome
- Applicant: Shuichi Tamamushi , Shuichiro Fukutome
- Applicant Address: JP Shizuoka
- Assignee: NuFlare Technology, Inc.
- Current Assignee: NuFlare Technology, Inc.
- Current Assignee Address: JP Shizuoka
- Agency: Finnegan, Henderson, Farabow, Garrett & Dunner, L.L.P.
- Priority: JP2006-000336 20060105
- Main IPC: C23F1/00
- IPC: C23F1/00 ; H01L21/306 ; C23C16/48 ; C23C16/52 ; C23C16/06 ; C23C16/22
Abstract:
A move mechanism for horizontally moving a target object in an accelerating manner, includes a moving unit configured to be horizontally moved in an accelerating manner, a plate part arranged on the moving unit and supported by the moving unit at a substantially center-of-gravity height position, and a mirror part configured to reflect a laser beam for measuring a position, the mirror part being connected to the plate part such that a center-of-gravity height position of the mirror part is arranged at the substantially center-of-gravity height position of the plate part.
Public/Granted literature
- US20070152169A1 Move mechanism for moving target object and charged particle beam writing apparatus Public/Granted day:2007-07-05
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