Invention Grant
- Patent Title: Method for forming MTJ cells
- Patent Title (中): 形成MTJ细胞的方法
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Application No.: US12696771Application Date: 2010-01-29
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Publication No.: US08278122B2Publication Date: 2012-10-02
- Inventor: Jiech-Fun Lu , Shih-Chang Liu , Chia-Shiung Tsai
- Applicant: Jiech-Fun Lu , Shih-Chang Liu , Chia-Shiung Tsai
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Slater & Matsil, L.L.P.
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
A method of forming an integrated circuit structure includes forming a bottom electrode layer over a substrate; forming magnetic tunnel junction (MTJ) layers over the bottom electrode layer; patterning the MTJ layers to form a MTJ stack; forming a dielectric layer covering the MTJ stack; forming an opening in the dielectric layer to expose a portion of the MTJ stack; filling the opening with a top electrode material; and performing a planarization to the top electrode material. After the step of performing the planarization, the top electrode material and the dielectric layer are patterned, wherein a first portion of the top electrode material in the opening forms a top electrode, and a second portion of the top electrode material forms a metal strip over the dielectric layer and connected to the top electrode.
Public/Granted literature
- US20110189796A1 Uniformity in the Performance of MTJ Cells Public/Granted day:2011-08-04
Information query
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