Invention Grant
US08278140B2 Method for preparing IGZO particles and method for preparing IGZO film by using the IGZO particles
有权
制备IGZO颗粒的方法和使用IGZO颗粒制备IGZO膜的方法
- Patent Title: Method for preparing IGZO particles and method for preparing IGZO film by using the IGZO particles
- Patent Title (中): 制备IGZO颗粒的方法和使用IGZO颗粒制备IGZO膜的方法
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Application No.: US12591767Application Date: 2009-12-01
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Publication No.: US08278140B2Publication Date: 2012-10-02
- Inventor: Ya-Hui Yang , Sueli Sidney Yang , Chen-Yu Kao , Kan-San Chou , Sinn-Wen Chen
- Applicant: Ya-Hui Yang , Sueli Sidney Yang , Chen-Yu Kao , Kan-San Chou , Sinn-Wen Chen
- Applicant Address: TW Hsinchu
- Assignee: National Tsing Hua University
- Current Assignee: National Tsing Hua University
- Current Assignee Address: TW Hsinchu
- Agency: Bacon & Thomas, PLLC
- Priority: TW98135888A 20091023
- Main IPC: H01L21/00
- IPC: H01L21/00
Abstract:
A method for preparing IGZO particles and a method for preparing an IGZO thin film by using the IGZO particles are disclosed. The method for preparing the IGZO particles comprises the following steps: (A) providing a solution of metal acid salts, which contains a zinc salt, an indium salt, and a gallium salt; (B) mixing the solution of the metal acid salts with a basic solution to obtain an oxide precursor; and (C) heating the oxide precursor to obtain IGZO particles.
Public/Granted literature
- US20110097842A1 Method for preparing IGZO particles and method for preparing IGZO film by using the IGZO particles Public/Granted day:2011-04-28
Information query
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