Invention Grant
- Patent Title: Semiconductor device and a method of manufacturing the same
- Patent Title (中): 半导体装置及其制造方法
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Application No.: US12885086Application Date: 2010-09-17
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Publication No.: US08278169B2Publication Date: 2012-10-02
- Inventor: Koichi Toba , Yasushi Ishii , Yoshiyuki Kawashima , Takashi Hashimoto , Kosuke Okuyama
- Applicant: Koichi Toba , Yasushi Ishii , Yoshiyuki Kawashima , Takashi Hashimoto , Kosuke Okuyama
- Applicant Address: JP Kawasaki-shi
- Assignee: Renesas Electronics Corporation
- Current Assignee: Renesas Electronics Corporation
- Current Assignee Address: JP Kawasaki-shi
- Agency: Miles & Stockbridge P.C.
- Priority: JP2007-168915 20070627
- Main IPC: H01L21/336
- IPC: H01L21/336

Abstract:
The present invention provides a technology capable of reducing an area occupied by a nonvolatile memory while improving the reliability of the nonvolatile memory. In a semiconductor device, the structure of a code flash memory cell is differentiated from that of a data flash memory cell. More specifically, in the code flash memory cell, a memory gate electrode is formed only over the side surface on one side of a control gate electrode to improve a reading speed. In the data flash memory cell, on the other hand, a memory gate electrode is formed over the side surfaces on both sides of a control gate electrode. By using a multivalued memory cell instead of a binary memory cell, the resulting data flash memory cell can have improved reliability while preventing deterioration of retention properties and reduce its area.
Public/Granted literature
- US20110008943A1 SEMICONDUCTOR DEVICE AND A METHOD OF MANUFACTURING THE SAME Public/Granted day:2011-01-13
Information query
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