Invention Grant
- Patent Title: Conductive spacers extended floating gates
- Patent Title (中): 导电间隔物延伸浮动门
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Application No.: US12176868Application Date: 2008-07-21
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Publication No.: US08278202B2Publication Date: 2012-10-02
- Inventor: Antonius Maria Petrus Johannes Hendricks , Josephus Franciscus Antonius Maria Guelen , Guido Jozef Maria Dormans
- Applicant: Antonius Maria Petrus Johannes Hendricks , Josephus Franciscus Antonius Maria Guelen , Guido Jozef Maria Dormans
- Applicant Address: NL Eindhoven
- Assignee: NXP B.V.
- Current Assignee: NXP B.V.
- Current Assignee Address: NL Eindhoven
- Priority: EP02077452 20020620
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
A method for manufacturing on a substrate a semiconductor device with a floating-gate and a control-gate. The method includes the steps of first forming an isolation zone in the substrate, and thereafter forming the floating gate on the substrate. The method further includes extending the floating gate using spacers, and then forming the control gate over the floating gate and the spacers.
Public/Granted literature
- US20090087976A1 Conductive Spacers Extended Floating Gates Public/Granted day:2009-04-02
Information query
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